Properties of Ultra Fast Deposited Diamond-Like Hydrogenated Carbon Films
نویسندگان
چکیده
منابع مشابه
Diamond-like Carbon Films Deposited by Hydrocarbon Plasma Sources
Diamond-like carbon deposition techniques, characterization techniques and processing parameters, such as gas ratio, bias voltage, gas pressure, type of precursor gas used, temperature, gas total flow, substrate material, among others are reviewed. Mostly silicon substrates have been employed, but also metallic materials such as titanium and aluminum alloys or steels have been used as well. Imp...
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Amorphous hydrogenated and/or nitrogenated carbon films, a-C:H/a-C:N, in overall thickness up to 2 nm are materials of choice as a mechanical and corrosion protection layer of the magnetic media in modern hard disk drive disks. In order to obtain high density and void-free films the sputtering technology has been replaced by different plasma and ion beam deposition techniques. Hydrocarbon gas p...
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ژورنال
عنوان ژورنال: Acta Physica Polonica A
سال: 2011
ISSN: 0587-4246,1898-794X
DOI: 10.12693/aphyspola.120.156